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STP-H1303cv愛德華STP-H1303C分子泵加SCU-800控製器
3030-14548HORIBA流量計LF-A40M-A-EVD TEOS 6g/min
8135921G002EDwardsCTICRYOGENICS IS-1000壓縮機
mks新18luck356004-YG-T
0190-51152AMAT噴射閥HORIBAIV-2410AV-02h流量計
mks360/370 Stabil-Ion Gauge Part Number:360190
AE Paramount1513電源3156310-020 3156310-032 315631
LAM P/N853-800087-404電源
LF-310A-EVDHoriba Stec,LFC, Ta(OC2H5)5, 0.2g/min,
Tylan MFC 2900 series FM-3900MEP, N2 Gas, Range 20
AMAT 0195-14327電源Granville-Phillips 隔膜規390628-0-YE